simulation of a microgripper with electrothermal actuator using comsol software based on the finite element method
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abstract
micro-electro-mechanical systems (mems) are combination of electrical and mechanical components in micron dimensions. in recent years, holding, actuating methods and handling of mems components such asmicrogripper, microsensors and etc. have been deeply studied. microgrippers for handling, positioning andassembling of micro components are very useful so that for clamping need actuation created usingelectrostatic, electrothermal, and electromagnetic actuators. in this paper, a new design of an electrothermalmicrogripper with u-shape actuators for holding and carrying a wide range of parts at the same time, forvoltages corresponding between 1 to 10 volts, have been fabricated. the microgripper is made of siliconewith thickness of 25 microns, and pieces between 460 to 480 microns that can hold it. the behavior of themicrogripper in multi physics powerful finite element software (comsol) was evaluated and thedisplacements of arms hold and heat generations have been simulated.
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Journal title:
journal of modern processes in manufacturing and productionPublisher: islamic azad univesity, najafabad branch
ISSN
volume 2
issue 3 2013
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